Trikon Technologies Sigma 200 Calibration Kit 150mm 715917/A SPTS KLA Working img{max-width:100%} GasTech 81-0221 H2 Gas

img{max-width:100%} GasTech 81-0221 H2 Gas Calibration Kit ASM 83-107564A06 New

Unit has a minor bent of the frame and is missing some of the rear cover screws (see photos)

img{max-width:100%} Omron E3L-2RC4 Left Load Lock Wafer Present Sensor ASM 02-142758-01 New Surplus

This UNIT Instruments UFC-2050A Mass Flow Controller MFC 30 SLM N2 is used working surplus

Trikon Technologies Sigma 200 Calibration Kit 150mm 715917/A SPTS KLA Working img{max-width:100%} GasTech 81-0221 H2 GasTrikon Technologies Sigma 200 Calibration Kit 150mm 715917 A SPTS KLA Working Inventory # CONF 1614 Part No: SIGMA 200 CALIBRATION KIT Included Components Part No: 715917 A 150MM WAFER UNCOOLER SETUP DISC Part No: 715914 A GTM CASSETTE LOCATION TOOL Part No: 715900 B 150MM DEP HSE PLATEN ARM SETUP TOOL Part No: 715903 A GTM DEP ALIGNER CASSETTE SETUP TOOL Part No: 000 1293 23, Rev. B Part No: 001 9197 06, Rev. 4 T M Trikon Part No: 156311C04 150MM ARM