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TEL Tokyo Electron 3M80-001641-11 Gas PCB SW300B AIO2 FCS GIL22 Trias Working img{max-width:100%} V-Tex 3-850133-^8 Pneumatic SlitTEL Tokyo Electron 3M80 001641 11 Gas PCB SW300B AIO2 FCS GIL22 Trias Working Inventory # A 19496 Part No: 3M80 001641 11 Model No: SW300B GAS31 3M08 028701 11 Daughterboard 1 Part No: 3M80 001582 13, SW300B AIO2 (Qty. 2) Daughterboard 2 Part No: 3M80 001677 11, SW300B FCS Daughterboard 3 Part No: 3M80 001648 11, SW300B GIL22 Removed from a TEL Tokyo Electron Trias CVD Chemical Vapor Deposition System This TEL Tokyo Electron 3M80 001641 11 Gas PCB is